Journal of vacuum science & technology. B, microelectronics and nanometer structures : processing, measurement, and phenomena : an official journal of the American Vacuum Society Read more about Journal of vacuum science & technology. B, microelectronics and nanometer structures : processing, measurement, and phenomena : an official journal of the American Vacuum Society
Journal of Vacuum Science & Technology B: Microelectronics, Processing and Phenomena: An Official Journal of the American Vacuum Society Read more about Journal of Vacuum Science & Technology B: Microelectronics, Processing and Phenomena: An Official Journal of the American Vacuum Society
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films Read more about Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films