Journal of Vacuum Science & Technology B: Microelectronics, Processing and Phenomena: An Official Journal of the American Vacuum Society

Link

https://avs.scitation.org/toc/jvm/current

Resource Type

Print ISSN

0734-211X

Online ISSN

2327-9877

Managed Coverage Begin

1/1/1983

Managed Coverage End

11/30/1990

Subject

Engineering and Technology

Mechanical Engineering and Machinery

Science and Technology

Vacuum technology

Publisher

American Institute of Physics (AIP)